Электронный каталог

Периодическое издание

Materials Science in Semiconductor Processing [Electronic resource]. – Elsevier Ltd., 2022-. – ISSN 1369-8001.
Выпуск

Materials Science in Semiconductor Processing. – 2025. – Vol. 199. – Electronic journal. – URL: https://www.sciencedirect.com/journal/materials-science-in-semiconductor-processing/vol/199/suppl/C (дата обращения: 11-08-2025). – Title from the title screen. – Text : electronic.