Электронный каталог

Периодическое издание

Journal of Vacuum Science and Technology. – New York : AIP, 1970-1974. – ISSN 2166-2746; 2166-2754-online.
Выпуск

Journal of Vacuum Science and Technology [Electronic resource]. – 2024. – Vol. 42, No. 3. – Electronic journal. – URL: https://pubs.aip.org/avs/jvb/issue/42/3 (дата обращения: 17-02-2025). – Title from the title screen.