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Электронный каталог: Hoshino, Y. - Formation of SIMOX–SOI Structure by High-Temperature Oxygen Implantation
Hoshino, Y. - Formation of SIMOX–SOI Structure by High-Temperature Oxygen Implantation
Статья
Автор: Hoshino, Y.
Nuclear Instruments & Methods in Physics Research B: Formation of SIMOX–SOI Structure by High-Temperature Oxygen Implantation
б.г.
ISBN отсутствует
Автор: Hoshino, Y.
Nuclear Instruments & Methods in Physics Research B: Formation of SIMOX–SOI Structure by High-Temperature Oxygen Implantation
б.г.
ISBN отсутствует
Статья
Hoshino, Y.
Formation of SIMOX–SOI Structure by High-Temperature Oxygen Implantation / Y.Hoshino, [et al.] // Nuclear Instruments & Methods in Physics Research B. – 2015. – Vol.365, Pt.A. – p.137-140. – URL: http://dx.doi.org/10.1016/j.nimb.2015.08.037. – Bibliogr.:12.
Спец.(статьи,препринты) = С 349.1 - Действие излучения на материалы$
Hoshino, Y.
Formation of SIMOX–SOI Structure by High-Temperature Oxygen Implantation / Y.Hoshino, [et al.] // Nuclear Instruments & Methods in Physics Research B. – 2015. – Vol.365, Pt.A. – p.137-140. – URL: http://dx.doi.org/10.1016/j.nimb.2015.08.037. – Bibliogr.:12.
Спец.(статьи,препринты) = С 349.1 - Действие излучения на материалы$