Электронный каталог

Статья

Ismail, I.M.
XPS and RBS Investigation of TiN&sub(x)O&sub(y) Films Prepared by Vacuum arc Discharge / I.M.Ismail, [a.o.] // Nuclear Instruments & Methods in Physics Research B : Beam Interactins with Materials and Atoms. – 2012. – Vol.271. – p.102-106. – URL: http://dx.doi.org/10.1016/j.nimb.2011.11.010. – Bibliogr.:34.



Спец.(статьи,препринты) = С 344.4б - Методы приготовления тонких пленок$