Электронный каталог

Статья

Voss, L.F.
Comparison of CF&sub(4) and SF&sub(6) Based Plasmas for ECR Etching of Isotopically Enriched *1*0Boron Films / L.F.Voss, [et al.] // Nuclear Instruments & Methods in Physics Research A : Accelerators,spectrometers,detectors and associated equipment. – 2009. – Vol.606, No.3. – p.821-823. – URL: http://dx.doi.org/10.1016/j.nima.2009.05.020. – Bibliogr.:14.



Спец.(статьи,препринты) = С 344.1л - Нейтронные детекторы. Спектрометры. Монохроматоры