Электронный каталог

Статья

Vanhove, N.
Particle Emission from Chemically Enhanced Electron-Beam-Induced Etching of Si: An Approach for Zero-Energy Secondary-Ion Mass Spectrometry / N.Vanhove, [a.o.] // Physical Review B : Condensed Matter and Materials Physics. – 2009. – Vol.79, No.3. – p.035305. – URL: http://dx.doi.org/10.1103/PhysRevB.79.035305. – Bibliogr.:17.



Спец.(статьи,препринты) = С 349.1 - Действие излучения на материалы$