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Электронный каталог: Sano, Y. - Fabrication of Ultrathin and Highly Uniform Silicon on Insulator by Numerically Controlled Plasma...
Sano, Y. - Fabrication of Ultrathin and Highly Uniform Silicon on Insulator by Numerically Controlled Plasma...
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Статья
Автор: Sano, Y.
Review of Scientific Instruments: Fabrication of Ultrathin and Highly Uniform Silicon on Insulator by Numerically Controlled Plasma...
б.г.
ISBN отсутствует
Автор: Sano, Y.
Review of Scientific Instruments: Fabrication of Ultrathin and Highly Uniform Silicon on Insulator by Numerically Controlled Plasma...
б.г.
ISBN отсутствует
Статья
Sano, Y.
Fabrication of Ultrathin and Highly Uniform Silicon on Insulator by Numerically Controlled Plasma Chemical Vaporization Machining / Y.Sano, [et al.] // Review of Scientific Instruments. – 2007. – Vol.78, No.8. – p.086102. – URL: http://dx.doi.org/10.1063/1.2766836. – Bibliogr.:7.
Спец.(статьи,препринты) = Ц 738.21 - Интегральные схемы. Микросхемотехника
Sano, Y.
Fabrication of Ultrathin and Highly Uniform Silicon on Insulator by Numerically Controlled Plasma Chemical Vaporization Machining / Y.Sano, [et al.] // Review of Scientific Instruments. – 2007. – Vol.78, No.8. – p.086102. – URL: http://dx.doi.org/10.1063/1.2766836. – Bibliogr.:7.
Спец.(статьи,препринты) = Ц 738.21 - Интегральные схемы. Микросхемотехника